Nanoelectronics research center imec of Leuven, Belgium has opened its new 300mm cleanroom. With this 4000m2 new facility, imec's semiconductor research cleanrooms (dedicated to scaling IC technology beyond 7nm) now total 12,000m2. Global partners including foundries, integrated device manufacturers (IDMs), fabless and fablite companies, and equipment and material suppliers, will benefit from leading-edge processing equipment (including alfa and beta tools) to develop solutions for more powerful, high-performing, cheaper and energy-efficient ICs.
Extending the existing cleanroom, the new facility complies with the latest semiconductor industry standards, and provides additional space for the most advanced tools. Installation of the first tools began in January. The new 300mm cleanroom complements imec's other production facilities including its bio-nanolabs, neuroelectronics labs, imaging and wireless and electronics test labs, photovoltaic pilot lines, and gallium nitride on silicon (GaN-on-Si), silicon photonics and MEMS pilot lines.
"The extension of our cleanroom provides our partners with the necessary resources for continued leading-edge innovation and imec's success in the future within the local and global high-tech industry," believes president & CEO Luc Van den hove.
Cleanroom construction was completed in 20 months (by infrastructure contractor M+W) and includes a reflecting facade designed by architect Stéphane Beel, which is intended to integrate the building with the environment. The new cleanroom comprises a total investment (building and equipment) of more than €1bn, including €100m in funding from the Flemish Government and more than €900m in investments from joint R&D with leading players from the entire semiconductor industry (totaling more than 90 industrial partners).